ACLS insider transactions

Director Sayiner Necip sold $249,703 worth of shares (1,586 units at $157.44), decreasing direct ownership by 18% to 7,112 units (SEC Form 4)

EVP Global Operations Mahoney Robert John sold $179,302 worth of shares (1,155 units at $155.24), decreasing direct ownership by 7% to 14,410 units (SEC Form 4)

VP Corporate Controller Sutton Todd sold $319,980 worth of shares (2,000 units at $159.99), decreasing direct ownership by 24% to 6,360 units (SEC Form 4)

Director St Dennis Thomas sold $139,833 worth of shares (900 units at $155.37), decreasing direct ownership by 5% to 17,695 units (SEC Form 4)

EVP, General Counsel and Sec'y Evans Eileen sold $143,998 worth of shares (926 units at $155.51), decreasing direct ownership by 3% to 31,295 units (SEC Form 4)

EVP, Research, Dev. & Eng. Blumenstock Gerald M sold $177,285 worth of shares (1,161 units at $152.70), decreasing direct ownership by 5% to 20,493 units (SEC Form 4)

EVP Global Customer Operations Tatnall Christopher sold $174,608 worth of shares (1,166 units at $149.75), decreasing direct ownership by 4% to 27,627 units (SEC Form 4)

Director Quirk Jeanne sold $250,854 worth of shares (1,789 units at $140.22), decreasing direct ownership by 14% to 11,400 units (SEC Form 4)

Director Graves Gregory B sold $456,697 worth of shares (3,225 units at $141.61), decreasing direct ownership by 37% to 5,473 units (SEC Form 4)

Director Kurtzweil John T sold $485,771 worth of shares (3,500 units at $138.79), decreasing direct ownership by 10% to 32,990 units (SEC Form 4)

PRESIDENT AND CEO Low Russell covered exercise/tax liability with 711 shares, decreasing direct ownership by 0.46% to 154,900 units (SEC Form 4) (withholding obligation)

EVP Global Operations Mahoney Robert John covered exercise/tax liability with 312 shares, decreasing direct ownership by 2% to 15,565 units (SEC Form 4) to satisfy tax liability

VP Corporate Controller Sutton Todd covered exercise/tax liability with 184 shares, decreasing direct ownership by 2% to 8,360 units (SEC Form 4) to satisfy withholding obligation

EVP MARKETING AND APPLICATIONS Redinbo Greg covered exercise/tax liability with 190 shares, decreasing direct ownership by 0.54% to 35,024 units (SEC Form 4) to satisfy withholding obligation

SVP Interim CFO Ryzhik David was granted 3,115 shares and covered exercise/tax liability with 226 shares, increasing direct ownership by 40% to 10,031 units (SEC Form 4) to satisfy withholding obligation

EVP Global Operations Mahoney Robert John was granted 3,894 shares and covered exercise/tax liability with 776 shares, increasing direct ownership by 24% to 15,877 units (SEC Form 4) to satisfy tax liability

VP Corporate Controller Sutton Todd was granted 1,168 shares and covered exercise/tax liability with 441 shares, increasing direct ownership by 9% to 8,544 units (SEC Form 4) (for tax liability)

PRESIDENT AND CEO Low Russell was granted 38,932 shares and covered exercise/tax liability with 6,891 shares, increasing direct ownership by 26% to 155,611 units (SEC Form 4) to cover withholding tax

EVP, General Counsel and Sec'y Evans Eileen was granted 7,786 shares and covered exercise/tax liability with 867 shares, increasing direct ownership by 27% to 32,221 units (SEC Form 4) (tax liability)

EVP, Research, Dev. & Eng. Blumenstock Gerald M was granted 5,450 shares and covered exercise/tax liability with 1,089 shares, increasing direct ownership by 25% to 21,654 units (SEC Form 4) to satisfy withholding obligation

EVP MARKETING AND APPLICATIONS Redinbo Greg was granted 6,230 shares and covered exercise/tax liability with 839 shares, increasing direct ownership by 18% to 35,214 units (SEC Form 4) (withholding obligation)

EVP Global Customer Operations Tatnall Christopher was granted 7,008 shares and covered exercise/tax liability with 1,259 shares, increasing direct ownership by 25% to 28,793 units (SEC Form 4) to satisfy tax liability

Director Sayiner Necip was granted 1,440 shares, increasing direct ownership by 20% to 8,698 units (SEC Form 4)

Director Titinger Jorge was granted 1,440 shares, increasing direct ownership by 32% to 5,917 units (SEC Form 4)

Director St Dennis Thomas was granted 1,440 shares, increasing direct ownership by 8% to 18,595 units (SEC Form 4)

Director Quirk Jeanne was granted 1,440 shares, increasing direct ownership by 12% to 13,189 units (SEC Form 4)

Director Kurtzweil John T was granted 1,440 shares, increasing direct ownership by 4% to 36,490 units (SEC Form 4)

Director Graves Gregory B was granted 1,440 shares, increasing direct ownership by 20% to 8,698 units (SEC Form 4)

Director Chiu Tzu Yin was granted 1,440 shares, increasing direct ownership by 14% to 11,843 units (SEC Form 4)

SEC Form 4 filed by Axcelis Technologies Inc.

VP Corporate Controller Sutton Todd sold $421,865 worth of shares (2,574 units at $163.89), decreasing direct ownership by 25% to 7,817 units (SEC Form 4)

EVP MARKETING AND APPLICATIONS Redinbo Greg sold $463,731 worth of shares (2,883 units at $160.85), decreasing direct ownership by 9% to 29,823 units (SEC Form 4)

Director Titinger Jorge sold $328,280 worth of shares (2,000 units at $164.14), decreasing direct ownership by 31% to 4,477 units (SEC Form 4)

EVP Global Operations Mahoney Robert John sold $363,538 worth of shares (2,258 units at $161.00), decreasing direct ownership by 15% to 12,759 units (SEC Form 4)

PRESIDENT AND CEO Low Russell sold $1,170,609 worth of shares (7,468 units at $156.75) as part of a pre-agreed trading plan, decreasing direct ownership by 6% to 123,570 units (SEC Form 4)

PRESIDENT AND CEO Low Russell sold $172,742 worth of shares (1,244 units at $138.86) as part of a pre-agreed trading plan, decreasing direct ownership by 0.94% to 131,038 units (SEC Form 4)

SEC Form 4 filed by Tatnall Christopher

SEC Form 4 filed by Low Russell

SEC Form 4 filed by Low Russell

SEC Form 3 filed by new insider Sutton Todd

SEC Form 3 filed by new insider Ryzhik David

EVP, Research, Dev. & Eng. Blumenstock Gerald M covered exercise/tax liability with 1,121 shares, decreasing direct ownership by 6% to 17,540 units (SEC Form 4)

EVP Global Operations Mahoney Robert John covered exercise/tax liability with 573 shares, decreasing direct ownership by 4% to 14,633 units (SEC Form 4)

EVP Global Customer Operations Tatnall Christopher covered exercise/tax liability with 1,121 shares, decreasing direct ownership by 5% to 23,183 units (SEC Form 4)

EVP AND CFO Coogan James Gordon covered exercise/tax liability with 1,800 shares, decreasing direct ownership by 5% to 37,144 units (SEC Form 4)

EVP MARKETING AND APPLICATIONS Redinbo Greg covered exercise/tax liability with 723 shares, decreasing direct ownership by 2% to 31,938 units (SEC Form 4)

PRESIDENT AND CEO Low Russell covered exercise/tax liability with 5,227 shares, decreasing direct ownership by 4% to 130,928 units (SEC Form 4)

Director Titinger Jorge sold $80,000 worth of shares (1,000 units at $80.00), decreasing direct ownership by 13% to 6,477 units (SEC Form 4)

EVP Global Operations Mahoney Robert John was granted 1,734 shares, increasing direct ownership by 13% to 15,206 units (SEC Form 4)

New insider Mahoney Robert John claimed ownership of 13,472 shares (SEC Form 3)

EVP, General Counsel and Sec'y Evans Eileen covered exercise/tax liability with 1,378 shares, decreasing direct ownership by 5% to 24,406 units (SEC Form 4)

Director Titinger Jorge sold $172,100 worth of shares (2,000 units at $86.05), decreasing direct ownership by 21% to 7,477 units (SEC Form 4)

EVP, Research, Dev. & Eng. Blumenstock Gerald M sold $271,422 worth of shares (3,034 units at $89.46), decreasing direct ownership by 14% to 18,661 units (SEC Form 4)

EVP AND CFO Coogan James Gordon covered exercise/tax liability with 713 shares, decreasing direct ownership by 2% to 38,944 units (SEC Form 4)

EVP MARKETING AND APPLICATIONS Redinbo Greg covered exercise/tax liability with 208 shares, decreasing direct ownership by 0.63% to 32,661 units (SEC Form 4)

EVP Global Customer Operations Tatnall Christopher covered exercise/tax liability with 137 shares, decreasing direct ownership by 0.56% to 24,304 units (SEC Form 4)

EVP MARKETING AND APPLICATIONS Redinbo Greg covered exercise/tax liability with 734 shares, decreasing direct ownership by 2% to 32,869 units (SEC Form 4)

EVP, Research, Dev. & Eng. Blumenstock Gerald M covered exercise/tax liability with 506 shares, decreasing direct ownership by 2% to 21,695 units (SEC Form 4)

Director Kurtzweil John T sold $104,166 worth of shares (1,682 units at $61.93), decreasing direct ownership by 5% to 35,050 units (SEC Form 4)

EVP MARKETING AND APPLICATIONS Redinbo Greg covered exercise/tax liability with 190 shares, decreasing direct ownership by 0.56% to 33,603 units (SEC Form 4)